منابع مشابه
Review Article Direct-Write Ion Beam Lithography
Patterning with a focused ion beam (FIB) is an extremely versatile fabrication process that can be used to create microscale and nanoscale designs on the surface of practically any solid sample material. Based on the type of ion-sample interaction utilized, FIBbasedmanufacturing can be both subtractive and additive, even in the same processing step. Indeed, the capability of easily creating thr...
متن کاملThree-dimensional direct-write lithography into photopolymer.
We demonstrate a three-dimensional direct-write lithography system capable of writing deeply buried, localized index structures into diffusion-mediated photopolymer. The system is similar to that used for femtosecond writing in glass, but has a number of advantages including greater flexibility in the writing media and the ability to use low power, inexpensive, continuous-wave lasers. This syst...
متن کاملReduced complexity compression algorithms for direct-write maskless lithography systems
Hsin-I Liu Vito Dai Avideh Zakhor Borivoje Nikolić University of California, Berkeley Department of Electrical Engineering and Computer Science Berkeley, California E-mail: [email protected] Abstract. Achieving the throughput of one wafer layer per minute with a direct-write maskless lithography system, using 22-nm pixels for 45-nm feature sizes, requires data rates of about 12 Tb/s. In ou...
متن کاملPhotopolymer Waveguide to Fiber Coupling via 3d Direct-write Lithography
Date The final copy of this thesis has been examined by the signatories, and we find that both the content and the form meet acceptable presentation standards of scholarly work in the above mentioned discipline. Photopolymer Waveguide to Fiber Coupling via 3D Direct-Write Lithography Thesis directed by Professor Robert R. McLeod This thesis proposes and demonstrates a novel method of pigtailing...
متن کاملGeneration of Customizable Micro-wavy Pattern through Grayscale Direct Image Lithography
With the increasing amount of research work in surface studies, a more effective method of producing patterned microstructures is highly desired due to the geometric limitations and complex fabricating process of current techniques. This paper presents an efficient and cost-effective method to generate customizable micro-wavy pattern using direct image lithography. This method utilizes a graysc...
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ژورنال
عنوان ژورنال: Advanced Optical Technologies
سال: 2019
ISSN: 2192-8584,2192-8576
DOI: 10.1515/aot-2019-0024